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Linear Technology Application Note 19
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Author: Chien-Sheng Liuchien-Sheng Liu SciProfils Scilirogo Schoonal 2, 3
The submission was received: 27. November 2018 / revised: 11. December 2018 / adopted: 17. December 2018 / Published: 20. December 2018
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This article proposes the system using a measuring interferometer and analyzing sensitivity to the XL80 design for measuring geometric errors of the hexual linear direction (6 DOF). Each error is characterized by high independence with significantly reduced cross-pressure and errors of errors are extremely fast and accurate. Initially, the real light trajectory was modeled using a zimak. Then, to commit mathematical modeling and comparison, abuse was used by Matlab Rai. Then analyzed the sensitivity of each error in the sensor and to simplify and accelerate the budget of the mathematical model was used to install the curve. Finally, solidovorks was used to develop a system module set, approaching the proposed product system. This system measured the actual 6 geometric renal machine guns and compared to the measurements of the RenishAV XL-80 interferometer. The resulting step, yawning, horizontal flat and vertical deviations make up ± 0.5 ports, ± 3.6 arcsec, ± 2.6 μm and ± 2.3 um. The maximum deviation of the repetition of the measured steps, yawns, rolls, horizontal plane, vertical flat and locations is 0.4 arcsec, 0.2 Arcsec, 4.2 Arcsec, 1.5 μm, 0.3 microns and 3 mind, or 3 um.
With science and technology achievements, the Machine Machine Market Grows, and finished products become more complex and more complicated [1, 2]. The main part of the machine is a linear accurate guide that allows you to produce a good working piece [3, 4]. Due to processing and prefabricated errors, there are geometric errors in six degrees (6 DOF), including horizontal line (δK), positioning error (δI), vertical line of straight line (δz), ΕK, (ΕI), Roll errors (εI ) and a crop error (εz) [5, 6]. Improve the quality of the tool process [7, 8].
Measurement methods can be divided into two types: contactless and contact. For example, the contactless type of measurement is most used, such as a long-term method of measuring stroke. Moreover, the laser interferometer is often used to measure geometric error in the correctness of the linear machine [9, 10, 11]. The lack of this method is that any measurement can only quantify one geometric error. Measurement efficiency is noticeably low, and the measurement can change significantly, which makes measurement of measurement precision during longer measures [4, 8, 12]. In recent years, various scientists have been developed by numerous measurement of measurement of 6 geometric errors of DOF linear reference books [13, 14, 15, 16, 17, 18, 19, 20, 21, 23]. For example, Sun et al. For measuring 3 DOF shifts, corridor sensors are used and steady magnet (PM) (PM). Allred et al. Suggested several new applications and detailed analysis of 6 DOF measuring devices that used stewart platform structure [15]. The parallel mechanism was proposed by Mura et al. Based on stewart theory for measuring the actual deformation of the component [16, 17, 18].
Previous published methods relevant for this document were published in detail. Lee et al. Suggested system 6. DOF-MEASSIONS for simultaneous measurement of linear guidelines, but the measured route range was 4 mm [7]. Kuang et al. Suggested 5 – The linear system measures geometric error for simultaneous measurement, characterized by a large number of lenses or cymbals, combined to increase the sensitivity of each error [24]. Feng et al. Suggested system of simultaneous measuring 4 geometric errors DOF linear guidelines compensated for light drift [25]. Gao et al. [26]. Zhao et al. Another architecture is proposed for simultaneous measurement of 6 geometric errors, which combine an affordable micro-interferometer for measuring essential errors and optical fibers used to transmit light sources [27]. The above literature shows that there are limitations of simultaneous measurement of linear guidelines with long -ther geometric optics and is difficult to maintain high accuracy and repetition when measuring positioning positions, εi, long hits. The existing decision is that the positioning error is assessed by obstacles. Our research group develops multilayer geometric errors. In 2016, we published a study that determined that the measurement distance is limited by 3 doF measuring systems for equal attitude towards the surface [28] and we discussed its principles and methods of checking. We have published 6. DOF DOF measurement for linear management in 2017. years [4], in which the accuracy of the angle and accuracy of production reached ± 1 μm and ± 0.2 ports, but measurement was limited by the sensor size (6 mm) . In the future, we offered a modified 6 doF measuring system for linear management in 2018. years, which was carried out by a measurable move up to 250 mm, and the light fee was caused by light [29].
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S -id Special structure Suggested design system, three light routes with three sensitive detectors (PSDs) are very independent, and intersection can be reduced to a very low level in this system compared to error related to error in this link link [29]. Unlike the roof prizve used in the certificate [29], the proposed system uses a combination of Pent -Prism and a mirror that has the advantage of reducing the cross. When you interpret the image 5 confirmation [29] It is clear that the situation with the crossroads critical consideration when all errors are entered. Since the proposed measurement system in the analysis used the Taylor Series expansion, the calculation time for each measure was 5 minutes. However, calculation time for the mathematical model of this article is less than 1 second for any measurement in the proposed measuring system. The mathematical model refers to the mathematical formulas provided here for the equations (11) – (16).
In this article, we have proposed an enhanced 6-year error system for a long-term move that can measure 500mm, improving measurement accuracy in combination with a commercial interferometer in combination with a commercial interferometer in a combination of May. In addition to measuring the sale of linear guidelines in the optical table with proposed prototype, actual 6 geometric errors of DOF linear mechanical guidelines for assessing prototype efficiency are measured.
The structure of the proposed measuring system for simultaneous measurement of 6 geometric errors DOF Long linear phase is shown in Figure 1. The box consists of two parts: one fixed part and one moving part. Since the Renysphav KSL80 commercial interferometer, which combines with this system (Fig. 1), has general use in many laboratories, the source of the laser was replaced by laser diodes, and the position of talks with an error was excluded to simplify the experimental installation. Thus, a simplified measurement system can measure only 5 doF geometric errors, so the measure is the error of the positioning of the commercial interferometer RenisHAV KSL80. The rest of the components with a fixed part include the beam division (BS), two mirrors
